low-temperature vapor deposition

low-temperature vapor deposition
žematemperatūris garinis nusodinimas statusas T sritis radioelektronika atitikmenys: angl. low-temperature vapor deposition vok. Tieftemperaturdampfabscheidung, f rus. низкотемпературное осаждение из паровой фазы, n pranc. déposition en phase vapeur à basse température, f

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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